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1

SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Optical Microlithography XVII - Characterization of ACLV for advanced technology nodes using scatterometer-based lens fingerprinting technique

Wang, ChangAn, Smith, Bruce W., Zhang, Guohong, DeMoor, Stephen, Tan, Colin, Ilzhoefer, John, Atkinson, Chris, Wickman, Chad, Hansen, Steve, Geh, Bernd, Flagello, Donis G., Boehm, Mark

Year:

2004

Language:

english

File:

PDF, 238 KB

english, 2004

2

Status of fabrication development for plasma facing components in the EU

W Daenner, M Merola, P Lorenzetto, A Peacock, I Bobin-Vastra, L Briottet, P Bucci, D Conchon, A Erskine, F Escourbiac, M Febvre, M Grattarola, C.G Hjorth, G Hofmann, A Ilzhoefer, K Lill, A Lind, J Lin

Journal:

Fusion Engineering and Design

Year:

2002

Language:

english

File:

PDF, 469 KB

english, 2002

3

Recrystallization of silicon amorphized by carbon implantation

Chevacharoenkul, Sopa, Ilzhoefer, John R., Feijóo, Diego, Gösele, Ulrich

Journal:

Applied Physics Letters

Year:

1991

Language:

english

File:

PDF, 610 KB

english, 1991

4

Evidence of Hierarchical Order in an Amphiphilic Graft Terpolymer Gel

Ilzhoefer, John R., Broom, Brian C., Nepa, Stephen M., Vogler, Erwin A., Khan, Saad A., Spontak, Richard J.

Journal:

Journal of Physical Chemistry

Year:

1995

Language:

english

File:

PDF, 874 KB

english, 1995

5

Effect of Polymer Composition on the Morphology of Self-Assembled Dibenzylidene Sorbitol

Ilzhoefer, John R., Spontak, Richard J.

Journal:

Year:

1995

Language:

english

File:

PDF, 1.46 MB

english, 1995

6

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Optical Microlithography XVI - Illumination pupil fill measurement and analysis and its application in scanner V-H bias characterization for 130-nm node and beyond

Zhang, Gary, Wang, Changan, Tan, Colin L., Ilzhoefer, John R., Atkinson, Chris, Renwick, Stephen P., Slonaker, Steve D., Godfrey, David, Fruga, Catherine H., Yen, Anthony

Year:

2003

Language:

english

File:

PDF, 510 KB

english, 2003

7

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Multilevel Interconnect Technology II - 0.50-μm pitch metal integration in 0.18-μm technology

DeBord, Jeffrey R. D., Graef, Mart, Patel, Divyesh N., Jayaraman, Vidyasagar, Hewson, Melissa M., Lee, Wei W., Ilzhoefer, John R.

Year:

1998

Language:

english

File:

PDF, 1.71 MB

english, 1998

8

Effect of molecular architecture on DBS-induced block copolymer gels: A rheological study

Nuñez, Carlos M., Whitfield, J. Kaye, Mercurio, Debra J., Ilzhoefer, John R., Spontak, Richard J., Khan, Saad A.

Journal:

Macromolecular Symposia

Year:

1996

Language:

english

File:

PDF, 533 KB

english, 1996

9

Isolation of a novel association network in a polymer gel

John R. Ilzhoefer, Valerie M. Knowlton, Richard J. Spontak

Journal:

Microscopy Research and Technique

Year:

1995

Language:

english

File:

PDF, 251 KB

english, 1995

10

ITER primary first wall mock-up fabrication and testing for Be/Cu alloy joining development

P. Lorenzetto, A. Cardella, W. Daenner, M. Fèbvre, A. Ilzhoefer, W. Richards, M. Roedig

Journal:

Fusion Engineering and Design

Year:

2002

Language:

english

File:

PDF, 159 KB

english, 2002

11

Optical proximity correction and its application to CD control in high-speed microprocessors

Anthony Yen, M. Burkhardt, J.R. Ilzhoefer, R.G. Fleck, H. Du, J. Randall

Journal:

Microelectronic Engineering

Year:

1998

Language:

english

File:

PDF, 457 KB

english, 1998

12

SPIE Proceedings [SPIE 17th Annual BACUS Photomask Technology and Management - Redwood City, CA (Wednesday 17 September 1997)] 17th Annual BACUS Symposium on Photomask Technology and Management - Clear-field reticle defect disposition for advanced sub-half-micron lithography

Ibsen, Kent B., Ilzhoefer, John R., Eickhoff, Mark D., Reynolds, James A., Grenon, Brian J.

Year:

1998

Language:

english

File:

PDF, 712 KB

english, 1998

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